Packaged sensor with multiple sensors elements

摘要

The present disclose relates to sensor including multiple sensor elements. In some cases, the multiple sensor elements may be mounted on a single substrate and each may be configured to sense a single parameter with different resolutions, sensitivities, and/or ranges, and/or the multiple parameters. In one example, multiple pressure sensing die may be mounted in a single package, and each may be configured as a differential pressure sensor, an absolute pressure sensor, and/or a gauge pressure sensor, as desired.

主权项

1. A pressure sensor comprising:
a substrate including a first side and a second side; a first pressure sensing die mounted on the first side of the substrate, wherein the first pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm, wherein the first pressure sensing die is positioned over a first opening in the substrate, the first opening extending between the first side and the second side of the substrate; a second pressure sensing die mounted on the first side of the substrate, wherein the second pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm; a first housing member positioned on the first side of the substrate and defining a first cavity around the first pressure sensing die and the second pressure sensing die, wherein the first housing member includes a first pressure opening for exposing the first pressure sensing die and/or the second pressure sensing die to a first pressure; and a second housing member positioned on the second side of the substrate and defining a second cavity, wherein the second housing member includes a second pressure opening for exposing the first pressure sensing die and/or the second pressure sensing die to a second pressure.