| 摘要 |
<p>The present invention provides a liquid processing apparatus and a liquid chemical collecting method for preventing corrosion of a wiring provided on a substrate. The liquid processing apparatus according to an embodiment includes a processing unit, a collecting pipe, a supply pipe, and a gas supply unit. The processing unit performs liquid processing by supplying liquid chemical to the substrate. The collecting pipe collects the liquid chemical supplied to the processing unit. The supply pipe supplies the collected liquid chemical to the processing unit. The gas supply unit supplies inert gas to the inside of the collecting pipe.</p> |
