Electromagnetic radiation detecting device comprising an active bolometer and a shielded reference bolometer

摘要

A device for detecting electromagnetic radiation that comprises an active bolometer provided with a first element sensitive to said electromagnetic radiation and a reference bolometer identical to the active bolometer, provided with a second element sensitive to said electromagnetic radiation. The active bolometer and reference bolometer are arranged close to one another on the same substrate. A cover covers at least the part of the second sensitive element exposed to the electromagnetic radiation and arranges an empty space between said second sensitive element and the cover. The inner wall of the cover is constituted by an absorbent layer made from a material absorbing at least the thermal radiations emitted by the second sensitive element. A reflecting shield forms at least a part of the outer wall exposed to said electromagnetic radiation.

主权项

1. A device for detecting electromagnetic radiation that comprises on a single substrate:
an active bolometer equipped with a first element sensitive to said electromagnetic radiation, a reference bolometer identical to the active bolometer, equipped with a second element sensitive to said electromagnetic radiation, a cover having an outer wall and an inner surface facing towards the second sensitive element, said cover covering at least the part of the second sensitive element exposed to the electromagnetic radiation and arranging an empty space separating the second sensitive element and the inner surface and, a reflecting shield forming at least a part of the outer wall exposed to said electromagnetic radiation, wherein the entire inner surface of the cover is constituted by an absorbent layer, said layer being made from a material absorbing at least the thermal radiations emitted by the second sensitive element.