Method of manufacturing electromechanical transducer element, electromechanical transducer element, discharging head, and inkjet recording device

摘要

Disclosed is a method of manufacturing an electromechanical transducer element including a first process of hydrophobizing a first area of an electrode by forming a self-assembled monolayer film; a second process of applying a sol-gel solution onto a predetermined second area of the electrode so as to produce a complex oxide; a third process of producing the complex oxide by calcining the electrode; a fourth process of acid-washing the electrode on which the complex oxide has been produced; a fifth process of hydrophobizing the first area of the acid-washed electrode by forming the self-assembled monolayer film; a sixth process of applying the sol-gel solution onto the predetermined second area; and a seventh process of producing the complex oxide by calcining the electrode.

主权项

1. A method of manufacturing an electromechanical transducer element comprising:
a first process of hydrophobizing a first area of an electrode by forming a self-assembled monolayer film on the first area, wherein a complex oxide film has been formed on a predetermined second area of the electrode, and the complex oxide film has not been formed on the first area of the electrode; a second process of applying a sol-gel solution onto the predetermined second area of the electrode where the self-assembled monolayer film has not been formed, wherein the sol-gel solution is adjusted to produce the complex oxide; a third process of producing the complex oxide by calcining the electrode to which the sol-gel solution has been applied; a fourth process of acid-washing the electrode on which the complex oxide has been produced; a fifth process of hydrophobizing, by forming the self assembled monolayer film, the first area of the acid-washed electrode on which the complex oxide film has not been formed; a sixth process of applying the sol-gel solution onto the predetermined second area where the self-assembled monolayer film has not been formed; and a seventh process of producing the complex oxide by calcining the electrode on which the sol-gel solution has been applied.