发明名称 |
APPARATUS FOR EMITING SCRAP OF SEMICONDUCTOR PACKAGE SAWING EQUIPMENT |
摘要 |
The present technique relates to an apparatus for discharging the scrap of semiconductor package sawing equipment. An apparatus for discharging the scrap according to the present technique includes a main frame; a driving unit which is installed at the main frame and provides a driving force; a moving unit which includes a support part which reciprocates in an X axis by the driving force of the driving unit and supports a chuck table for mounting scraps, a first moving part which is combined with one side of the support part, a second moving part which is combined with the other side of the support part and guides the discharge of the scraps generated when the scraps are cut; and a guide unit which is fixed to the main frame and guides the X-axis movement of the moving unit. |
申请公布号 |
KR20140085876(A) |
申请公布日期 |
2014.07.08 |
申请号 |
KR20120155680 |
申请日期 |
2012.12.28 |
申请人 |
SK HYNIX INC. |
发明人 |
CHOI, JONG DEA;KIM, TAE HYUNG |
分类号 |
H01L21/02;H01L21/301;H01L21/78 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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