MANUFACTURING METHOD OF SPACE TRANSFORMER FOR GLASS BASE PROBE CARD AND THE SPACE TRANSFORMER FOR GLASS BASE PROBE CARD THEREBY

摘要

The present invention relates to space transformer for a probe card. A method of manufacturing the space transformer for a probe card comprises the following steps. In a first step, a glass substrate is prepared. In a second step, a mask pattern layer for forming a via-hole is formed on the glass substrate. In a third step, the via-hole is formed on the glass substrate according to a set pattern of the mask pattern layer. In a fourth step, the via-hole is filled with a conductive material. In a fifth step, a metal interconnection electrode, which is electrically connected with the via-hole, is formed on the glass substrate. And, an insulation film for insulating the metal interconnection electrodes from one another is formed on the glass substrate in a sixth step. By the method of manufacturing the space transformer for a glass-based probe card according to the present invention, single layer glass substrate space transformers, which are formed by repeating the first through sixth steps, are stacked to form the space transformer for a glass-based probe card. According to the present invention, a conventional multilayer ceramic simultaneous sintering process is not adopted, and deformation of the space transformer due to contractions and expansions is thus prevented. Furthermore, a manufacturing yield and productivity are improved and a manufacturing cost is reduced.