发明名称 Rotary nanotube bearing structure and methods for manufacturing and using the same
摘要 In one embodiment, a rotary device includes a multiwall nanotube that extends substantially perpendicularly from a substrate. A rotor may be coupled to an outer wall of the multiwall nanotube, be spaced apart from the substrate, and be free to rotate around an elongate axis of the multiwall nanotube.
申请公布号 US8771525(B2) 申请公布日期 2014.07.08
申请号 US201213681613 申请日期 2012.11.20
申请人 The Charles Stark Draper Laboratory, Inc. 发明人 Carter David J.;Weinberg Marc S.;Cook Eugene;Miraglia Peter
分类号 C23F1/00;B44C1/22;F16C33/04;B81C1/00;F04B19/00 主分类号 C23F1/00
代理机构 Lando & Anastasi, LLP 代理人 Lando & Anastasi, LLP
主权项 1. A method for fabricating a rotary device, comprising: providing a multiwall nanotube on a substrate; growing a conformal release layer on the substrate and around at least a portion of the multiwall nanotube, wherein the conformal release layer is grown after providing the multiwall nanotube on the substrate; depositing rotor material on the conformal release layer and around at least a portion of the multiwall nanotube; and removing at least a portion of the conformal release layer between surfaces of the substrate and the rotor material so as to space the rotor material from the substrate, but such that the rotor material remains coupled to the multiwall nanotube and is free to rotate about a long axis of the multiwall nanotube.
地址 Cambridge MA US