摘要 |
In the wavelength dispersive X-ray fluorescence spectrometer of the present invention, a counting loss correcting unit (11), when correcting a counting rate of pulses determined by a counting unit (10) on the basis of a dead time of a detector (7), stores beforehand a correlation between a predetermined pulse height range, within which pulses are selected by a pulse height analyzer (9), and the dead time and determines the dead time so as to correspond to the predetermined pulse height range during a measurement on the basis of the stored correlation. |
主权项 |
1. A wavelength dispersive X-ray fluorescence spectrometer which comprises:
an X-ray source for irradiating a sample with primary X-rays; a spectroscopic device for monochromating fluorescent X-rays emitted from the sample; a detector for receiving the fluorescent X-rays, which have been monochromated by the spectroscopic device, and generating pulses of a pulse height proportional to an energy of the fluorescent X-rays in a number dependent on an intensity of the fluorescent X-rays; a pulse height analyzer for selecting pulses of a pulse height within a predetermined pulse height range from the pulses generated by the detector; a counting unit for determining a counting rate of the pulses selected by the pulse height analyzer; and a counting loss correcting unit for correcting the counting rate of the pulses, determined by the counting unit, on the basis of a dead time of the detector with respect to a counting loss of the pulses to be counted; the counting loss correcting unit stores beforehand a correlation between each of a plurality of representative predetermined pulse height ranges and the dead time, and determines the dead time, which corresponds to the predetermined pulse height range during a measurement, on the basis of the correlation so stored, wherein the counting loss correcting unit stores beforehand a correlation between each of a plurality of representative predetermined pulse height ranges and the dead time in a standard spectrometer to be used as a basis, which is of the same kind as such wavelength dispersive X-ray fluorescence spectrometer, and a ratio between the dead time in such wavelength dispersive X-ray fluorescence spectrometer and the dead time in the standard spectrometer for a predetermined pulse height range to be used as a basis and determines the dead time, which corresponds to the predetermined pulse height range during the measurement, on the basis of the correlation and the ratio so stored. |