Physical quantity sensor

摘要

A physical quantity sensor includes a beam-like vibrating body and a fixing part supporting both ends of the beam-like vibrating body. A driving element is formed on a central portion of the beam-like vibrating body, and feedback elements are formed on both ends. A physical quantity acting on the beam-like vibrating body is detected by causing natural vibration in the beam-like vibrating body and detecting a natural frequency of the vibrating body. This enables reliable detection of a physical quantity, such as a strain or load, acting on an object.

主权项

1. A physical quantity sensor comprising:
a beam-like vibrating body; a fixing part supporting both ends of the vibrating body; a first piezoelectric element formed on a central portion of the vibrating body; a second piezoelectric element formed on one end of the vibrating body; and a third piezoelectric element formed on an other end of the vibrating body, wherein at least the vibrating body has a first surface and a second surface opposite to the first surface; and the first piezoelectric element, the second piezoelectric element and the third piezoelectric element are on the first surface.