发明名称 APPARATUS FOR DEPOSITING ORGANIC MATERIAL OF ORGANIC LIGHT EMITTING DIODES
摘要 An apparatus for depositing an organic material for manufacturing an organic light emitting device, according to the present invention, prevents sagging of a mask and simply transfers the mask by including a processing chamber to which a substrate moved with an inline method is inputted, a belt mask which is arranged in the processing chamber to face the substrate and includes a pattern to selectively pass deposition materials, a belt mask driving unit which rotates the belt mask, and a source unit which selectively deposits the deposition material on the substrate by supplying the deposition material to the belt mask.
申请公布号 KR20140086346(A) 申请公布日期 2014.07.08
申请号 KR20120156698 申请日期 2012.12.28
申请人 LIGADP CO., LTD. 发明人 HONG, SUNG JAE
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
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