发明名称 |
METHOD FOR FORMING HARD COATING |
摘要 |
Disclosed is a method for forming a hard coating for having a beautiful surface and high density and reducing a large particle by cleaning a substrate and controlling the degree of vacuum. According to the present invention, the method for forming a hard coating is as follows: mounting a base material on which a hard coating is deposited on a deposition device; injecting inert gas and reaction gas into the deposition device; generating plasma ion using an arc source while a pressure in the deposition device and the amount of the reaction gas are controlled; forming a first coating on the base material and cleaning the surface of the base material by making the plasma ion to collide to the surface of the base material by applying a bias voltage to the base material; and forming a second coating on the first coating by reducing the bias voltage applied to the base material. |
申请公布号 |
KR20140085762(A) |
申请公布日期 |
2014.07.08 |
申请号 |
KR20120155096 |
申请日期 |
2012.12.27 |
申请人 |
RESEARCH INSTITUTE OF INDUSTRIAL SCIENCE & TECHNOLOGY |
发明人 |
JEONG, JAE IN;YANG, JI HOON |
分类号 |
C23C14/24;C23C14/06 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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