发明名称 |
SPUTTERING DEVICES AND METHODS |
摘要 |
The invention provides devices and methods for depositing uniform coatings using cylindrical magnetron sputtering. The devices and methods of the invention are useful in depositing coatings on non-cylindrical workpiece surfaces. An assembly of electromagnets located within the bore of a hollow cylindrical emitter is used to form a magnetic field exterior to and near the exterior surface of the emitter. The magnet assembly configuration is selected to provide a magnetic field configuration compatible with the workpiece surface contour. The electromagnet assembly may be a plurality of magnet units, each unit having at least one electromagnet. The magnetic field strength from each magnet unit is separately and electrically adjustable. Each electromagnet in the assembly has a coil of electrically conducting material surrounding a specially shaped core of magnetic material. |
申请公布号 |
CA2601834(C) |
申请公布日期 |
2014.07.08 |
申请号 |
CA20062601834 |
申请日期 |
2006.03.14 |
申请人 |
BB5760 LTD |
发明人 |
IVANOV, DMITRI;YUMSHTYK, GENNADY |
分类号 |
C23C14/35 |
主分类号 |
C23C14/35 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|