Method for drying a substrate

摘要

A method for drying a workpiece using an apparatus comprising a liquid bath for immersing said workpiece, a deionized water supply for supplying deionized water to said bath, a partially enclosed volume of heated inert gas located above said liquid bath and a heated inert gas supply for supplying heated inert gas. A first holder is used for holding said workpiece in said liquid bath with a vertical orientation between the first holder and said liquid bath and a second holder, comprising a horizontal member, that is able to hold said at least one workpiece in such a way as to substantially prevent said workpiece from sliding along said horizontal member.

主权项

1. A method for washing and drying at least one workpiece, said workpiece having a substantially circumferential opening at a center location defining an inner diameter of said workpiece, the method comprising:
immersing said workpiece within liquid forming a liquid bath, wherein the liquid comprises deionized water; supplying heated inert gas to a partially enclosed volume above said liquid bath; holding said workpiece within said liquid bath with a vertical orientation using a first holder, and thereafter, drying said workpiece, said drying comprising separating said at least one workpiece from said liquid bath, said separating step comprising: providing a second holder, said second holder comprising a horizontal member, said horizontal member being structured to hold at least one workpiece in such a way as to substantially prevent said workpiece from sliding along said horizontal member, and moving said second holder laterally so that said at least one workpiece can be held on said horizontal member, wherein said moving laterally causes said horizontal member to penetrate the circumferential opening of said workpiece and causes said horizontal member to attach to said circumferential opening of said workpiece.