发明名称 Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
摘要 A piezoelectric element comprises a electrode and a piezoelectric layer made of a complex oxide having a perovskite structure containing at least bismuth, barium, iron, and titanium. A layered compound containing iron, barium, titanium and oxygen is formed between the piezoelectric layer and the electrode.
申请公布号 US8770723(B2) 申请公布日期 2014.07.08
申请号 US201113295326 申请日期 2011.11.14
申请人 Seiko Epson Corporation 发明人 Sakai Tomohiro;Morozumi Koichi;Asakawa Tsutomu
分类号 B41J2/045;H01L41/00;H02N2/00 主分类号 B41J2/045
代理机构 Workman Nydegger 代理人 Workman Nydegger
主权项 1. A piezoelectric element comprising: a first electrode; a second electrode; and a layered compound; and a piezoelectric layer made of a complex oxide having a perovskite structure containing at least bismuth, barium, iron, and titanium; wherein the layered compound contains iron, barium, titanium and oxygen and is formed between the piezoelectric layer and the first electrode and wherein the piezoelectric layer is formed between the layered compound and the second electrode, and wherein the layered compound is preferentially oriented along the (001) plane.
地址 Tokyo JP