Gas switching section including valves having different flow coefficients for gas distribution system

摘要

A gas switching system for a gas distribution system for supplying different gas compositions to a chamber, such as a plasma processing chamber of a plasma processing apparatus, is provided. The chamber can include multiple zones, and the gas switching section can supply different gases to the multiple zones. The switching section can switch the flows of one or more gases, such that one gas can be supplied to the chamber while another gas can be supplied to a by-pass line, and then switch the gas flows.

主权项

1. A method of processing a semiconductor substrate in a plasma processing apparatus including a showerhead electrode assembly having center and edge zones which are flow insulated from each other and a gas switching section in fluid communication with the center and edge zones of the showerhead electrode assembly wherein the gas switching section comprises a first gas passage adapted to be in fluid communication with a first gas line and the edge zone of the gas distribution member of the plasma processing chamber; a second gas passage adapted to be in fluid communication with the first gas line and a by-pass line; a third gas passage adapted to be in fluid communication with a second gas line and the center zone of the gas distribution member; a fourth gas passage adapted to be in fluid communication with the second gas line and the by-pass line; a fifth gas passage adapted to be in fluid communication with a third gas line and the center zone; a sixth gas passage adapted to be in fluid communication with the third gas line and the by-pass line; a seventh gas passage adapted to be in fluid communication with a fourth gas line and the edge zone; an eighth gas passage adapted to be in fluid communication with the fourth gas line and the by-pass line; first and second fast switching valves along the first and second gas passages respectively, the first fast switching valve operable to open and close the first gas passage and the second fast switching valve operable to open and close the second gas passage; third and fourth fast switching valves along the third and fourth gas passages, respectively, the third fast switching valve operable to open and close the third gas passage and the fourth fast switching valve operable to open and close the fourth gas passage; fifth and sixth fast switching valves along the fifth and sixth gas passages, respectively, the fifth fast switching valve operable to open and close the fifth gas passage and the sixth fast switching valve operable to open and close the sixth gas passage; and seventh and eighth fast switching valve along the seventh and eighth gas passages respectively, the seventh fast switching valve operable to open and close the seventh gas passage and the eighth fast switching valve operable to open and close the eighth gas passage; wherein when the first, third, sixth and eighth fast switching valves are opened and the second, fourth, fifth and seventh fast switching valves are closed a first process gas is supplied to the center and edge zones and a second process gas is diverted to the by-pass line; and when the second, fourth, fifth and seventh fast switching valves are opened and the first, third, sixth and eighth fast switching valves are closed the second process gas is supplied to the center and edge zones and the first process gas is diverted to the by-pass line, comprising:
a) supplying the first process gas to the center and edge zones of the showerhead electrode assembly while diverting the second process gas to the by-pass-line by opening the first, third, sixth, and eighth fast switching valves and closing the second, fourth, fifth, and seventh fast switching valves, the plasma processing chamber containing a semiconductor substrate including at least one layer and a patterned resist mask overlying the layer; b) producing a first plasma from the first process gas and (i) etching at least one feature in the layer or (ii) forming a polymer deposit on the mask; c) switching the flows of the first and second process gases by opening the second, fourth, fifth, and seventh fast switching valves and closing the first, third, sixth, and eighth fast switching valves so that the second process gas is supplied to the center and edge zones of the showerhead electrode assembly while the first process gas is diverted to the by-pass line; d) producing a second plasma from the second process gas and (iii) etching the at least one feature in the layer or (iv) forming a polymer deposit on the layer and the mask; e) switching the flows of the first and second process gases by opening the first, third, sixth, and eighth fast switching valves and closing the second, fourth, fifth, and seventh fast switching valves, so that the first process gas is supplied into the plasma processing chamber while the second process gas is diverted to the by-pass line; and f) repeating a)-e) a plurality of times with the substrate; wherein
the first fast switching valve has a first flow coefficient and the second fast switching valve has a second flow coefficient different than the first flow coefficient such that an inlet pressure of the first fast switching valve is substantially equal to an inlet pressure of the second fast switching valve when gas flow is switched from the first gas passage to the second gas passage by closing the first fast switching valve and opening the second fast switching valve, or from the second gas passage to the first gas passage by closing the second fast switching valve and opening the first fast switching valve;the third fast switching valve has a third flow coefficient and the fourth fast switching valve as a fourth flow coefficient different than the third flow coefficient such that an inlet pressure of the third fast switching valve is substantially equal to an inlet pressure of the fourth fast switching valve when gas flow is switched from the third gas passage to the fourth gas passage by closing the third fast switching valve and opening the fourth fast switching valve, or from the fourth gas passage to the third gas passage by closing the fourth fast switching valve and opening the third fast switching valve;the fifth fast switching valve has a fifth flow coefficient and the sixth fast switching valve has a sixth flow coefficient different than the fifth flow coefficient such that an inlet pressure of the fifth fast switching valve is substantially equal to an inlet pressure of the sixth fast switching valve when gas flow is switched from the fifth gas passage to the sixth gas passage by closing the fifth fast switching valve and opening the sixth fast switching valve, or from the sixth gas passage to the fifth gas passage by closing the sixth fast switching valve and opening the fifth fast switching valve; andthe seventh fast switching valve has a seventh flow coefficient and the eighth fast switching valve has an eighth flow coefficient different than the seventh flow coefficient such that an inlet pressure of the eighth fast switching valve is substantially equal to an inlet pressure of the seventh fast switching valve when gas flow is switched from the seventh gas passage to the eighth gas passage by closing the seventh fast switching valve and opening the eighth fast switching valve, or from the eighth gas passage to the seventh gas passage by closing the eighth fast switching valve and opening the seventh fast switching valve.