发明名称 DECOUPLING CAPACITOR FOR FINFET COMPATIBLE PROCESS
摘要 <p>A decoupling capacitor formed from a fin field-effect transistor (FinFET) and a method using the same are provided. An embodiment of the decoupling capacitor includes a fin field-effect transistor (FinFET) having a semiconductor substrate supporting a gate stack, a source, and a drain, a first terminal coupled to the semiconductor substrate and to the gate stack, the first terminal configured to couple with a first power rail, and a second terminal coupled to the source and to the drain, the second terminal configured to couple with a second power rail having a higher potential than the first power rail.</p>
申请公布号 KR20140086785(A) 申请公布日期 2014.07.08
申请号 KR20130033424 申请日期 2013.03.28
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 LEE JAM WEM;CHANG YI FENG
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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