System and method for inspection of electrical circuits

摘要

A system for inspection of electrical circuits including a calibration subsystem operative to apply a time varying voltage to an electrical circuit being inspected during calibration and to sense differences in an electrical state at various different locations in the electrical circuit being inspected, thereby providing an indication of location of defects therein.

主权项

1. A system for inspection of electrical circuits comprising:
a calibration subsystem operative to apply a time varying voltage to an electrical circuit being inspected during calibration and to sense differences in an electrical state at various different locations in the electrical circuit being inspected, thereby providing an indication of location of defects therein; a modulator having a calibration mode and a defect detection mode and being operative in said defect detection mode when a desired time varying voltage is being applied to the electrical circuit being inspected; and a defect detection subsystem, employing an output of said calibration subsystem, said calibration subsystem being operative to apply a voltage to plural locations of said electrical circuit being inspected during calibration operation thereof.