THIN LAYERS DEPOSITION APPARATUS FOR MANUFACTURING OLED

摘要

Disclosed is a thin film depositing apparatus for manufacturing an OLED. The thin film depositing apparatus for manufacturing an OLED according to an embodiment of the present invention includes a substrate arranged in a chamber in which a deposition material is deposited; a source unit which includes a spray nozzle to spray the deposition material to supply the deposition material to the substrate; and a shutter unit which is arranged on the upper side of the source unit and opens/closes the spray nozzle by rotation. Thereby, the maintenance and repair time of the shutter unit is reduced by preventing the deposition material from being accumulated on the shutter unit.