| 摘要 |
<p>In order to solve a problem in a mass spectrometry that a distribution of an emitted ion and a substance distribution on the measurement object surface are different from each other, which is due to a shaded portion of a irregular surface which falls under a shadow of primary beam, a primary ion optical system of the present apparatus includes a deflection unit configured to deflect the primary ion in such a manner that the primary ion intersects a flight space of the secondary ion in the course of flight.</p> |
