| 摘要 |
PURPOSE: A plasma induced gas cell for extreme ultraviolet light generation is provided to generate optimum EUV light through plasma induction using a source light and a reaction gas. CONSTITUTION: A light induction furnace (110) is formed in both sides along the length direction of a main body. A plasma induction furnace (120) is located between the light induction furnaces. A gas injection path (130) is comprised to be connected to the plasma induction furnace. The gas injection path supplies a plasma reaction gas supplied from the outside. A gas ventilation path (140) ventilates the gas existing in the plasma induction furnace to the outside. |
