SUBSTRATE ALIGN MODULE AND APPARATUS FOR DEPOSITION HAVING THE SAME

摘要

Provided are a substrate alignment module and a disposition apparatus including the substrate alignment module. The substrate alignment module according to a present embodiment is used to align substrates which includes a substrate support plate supporting an end unit of a substrate; a pin member which is coupled to the substrate support plate to support a first corner unit of the substrate and includes an inclined unit to slide the first corner unit downward; and a pusher which is coupled to the substrate support plate and presses a second corner unit facing the first corner unit of the substrate. The present invention employs a simple equipment configuration to precisely align the substrate loaded on a substrate support unit.