METHOD FOR MANUFACTURING SUBSTRATE FOR ELECTROOPTICAL DEVICE, ELECTRO OPTICAL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate for an electrooptical device, an electrooptical device and electronic equipment capable of improving yield and quality of a substrate for an electrooptical device with high light utilization efficiency.SOLUTION: A method for manufacturing an element substrate including a pixel electrode 28 and a TFT 24 for supplying an electric signal to the pixel electrode 28 includes the steps of: forming a groove 12 on a first surface 11a of a substrate 11 having optical transparency; forming a sealing layer 10 having optical transparency so as to close an opening part 12c of the groove 12 by covering the first surface 11a of the substrate 11; and forming the TFT 24 on the sealing layer 10. It includes a step of forming a transparent layer 17 having optical transparency on a second surface 11b on the opposite side of the first surface 11a of the substrate 11 before the step of forming the TFT 24.