| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate sensor capable of accurately detecting the position of a float without receiving the constraint of the material of a measurement pipe or fluid to be measured to accurately measure the flow rate and a flow rate control device using the flow rate sensor.SOLUTION: A flow rate sensor 2 in a flow rate measurement device 1 includes: a float 5 which moves in a measurement pipe 4 in accordance with the flow rate of fluid; and a plurality of TMR(Tunnel Magneto-Resistance) angle sensors 6, 6 and 6 which detect the position of the float 5 on the basis of the magnetic angle of a magnetic force line from the float 5. An output voltage corresponding to the magnetic angle of the magnetic force line which passes through each TMR angle sensor 6 is output, and the flow rate is calculated from a relationship between the output voltage and the position of the float 5. |
