发明名称 PROCESSING WASTE LIQUID TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a processing waste liquid treatment apparatus which stores only clear water after sufficient separation of processing chips in a clear water tank even when filtration means is new.SOLUTION: A processing waste liquid treatment apparatus is attached to a processing apparatus to store processing waste liquid produced in the processing apparatus and includes: filtration means including a pump which feeds processing waste liquid stored in a waste liquid tank, a cylindrical filter paper for filtering the processing waste liquid fed by the pump, and a fine particle powder charged into the cylindrical filter paper; a clear water reception portion for receiving the liquid filtrated by the filtration means; and a clear water tank for storing clear water flowing out from the clear water receiving portion. When the turbidity of a liquid flowing through a second flow-out passage, detected by turbidity detection means, with one end of the second flow-out passage connected to the clear water reception portion, becomes equal to or smaller than a specified value, switching means is actuated to cut off the connection of the second flow-out passage to the clear water reception portion while one end of a first flow-out passage is connected to the clear water reception portion.
申请公布号 JP2014124753(A) 申请公布日期 2014.07.07
申请号 JP20120285086 申请日期 2012.12.27
申请人 DISCO ABRASIVE SYST LTD 发明人 YOSHIDA MIKI;FURONAKA TAKESHI;FUJITA ATSUSHI
分类号 B24B57/00;B23Q11/00;H01L21/304 主分类号 B24B57/00
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