| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid jet head and a liquid jet apparatus that can suppress leakage of a liquid, a defect in discharging of droplets, and peeling of a laminated substrate by suppressing a silicon substrate from being eroded with a liquid.SOLUTION: A liquid jet head comprises: at least a nozzle plate 20 provided with nozzle openings 21 for discharging a liquid; and a flow passage formation substrate 10 provided with a pressure generation chamber 12 communicating the nozzle openings 21. The nozzle plate 20 is formed of a silicon substrate, and at least the flow passage formation substrate 10 and nozzle plate 20 are joined together after films 201, 203 including at least one of a hafnium oxide film and a zirconium oxide film formed through atomic layer deposition are provided over the entire surfaces including joint surfaces.</p> |
