| 摘要 |
<p>PROBLEM TO BE SOLVED: To remove a burr and debris generated when an open hole is formed in a pedestal constituting a sensor and obtain a joint area between the pedestal and a chip.SOLUTION: In manufacturing of a flow sensor including a pedestal jointed with a sensor chip, a joint surface 11 (a first surface) of a pedestal base material 10A with the sensor chip is polished, and an open hole 13 is formed to the opposite side surface 12 (a second surface) from the first surface 11. When the open hole 13 is formed, a first portion 13a having a first diameter Wis formed by etching only a predetermined depth from the first surface 11 of the pedestal base material 10A. A second portion 13b having a second diameter Wlarger than the first diameter Wis formed by drilling from the second surface 12 of the pedestal base material 10A to the first portion 13a.</p> |
