| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ultrasonic transducer apparatus which has sufficient strength and can further suppress reflected sound waves occurring inside a substrate opening.SOLUTION: The ultrasonic transducer apparatus includes: a substrate where a plurality of through-holes communicating in a thickness direction are placed in an array shape; an ultrasonic transducer element provided in a first substrate surface of the substrate in association with the plurality of through-holes; and a covering member which is provided in a second substrate surface opposite the first substrate of the substrate and covers openings of the through-holes on the second substrate. When a wavelength of ultrasonic wave in the air in a resonance frequency of the ultrasonic transducer element isλ, an average ridge height is Rpm, an average valley height is Rvm, at least a part of surface roughness of an opening surface exposed to the opening of the covering surface opposite to the second substrate surface of the covering member is a relation ofλ>Rpm>λ/2 andλ>Rvm>λ/2.</p> |
