VAPOR DEPOSITION MASK, AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition mask improved in an opening pattern shape and location accuracy.SOLUTION: A vapor deposition mask includes: a resin film 2 in which an opening pattern 6 with the same dimensions as that of a thin film pattern to be deposited on a substrate is formed; and a thin-plate type magnetic metal member 1 through which a through hole 4 is provided, of which size includes the opening pattern 6. The vapor deposition mask has a structure in which the resin film 2 and the thin-plate type film 2 contact tightly. A dummy through hole 5 is provided in a region of the magnetic metal member 1, other than the an evaporation effective region which includes the through hole 4. A dummy opening pattern 7 is provided to control deformation of the opening pattern 6 and the through hole 4, the deformation being caused by difference in thermal expansion between the film 2 and the magnetic metal member 1.