| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope apparatus capable of avoiding abnormal operation of a sample stage by grasping abrasion quantity of a frictional contact part and capable of reducing down time.SOLUTION: The electron microscope apparatus includes: a sample stage 109 including a brake mechanism 112 provided with a frictional contact part; a position detector 106 for finding out movement history of a table 110; a stage control device 40; an abrasion measurement part 108 for finding out abrasion quantity of the frictional contact part; and a stage driving part 107. The stage control device 40 includes: a set value holding part in which set movement history of the table 110 is registered; an operation history holding part for storing the movement history of the table 110 found out by the position detector 106; a deviation calculation part for finding out a difference between the movement history registered in the set value holding part and the movement history stored in the operation history holding part; and an operation condition adjustment part for correcting an operation condition of the table 110 from the difference of the movement history and the abrasion quantity. The stage driving part 107 moves the table 110 in accordance with the operation condition corrected by the operation condition adjustment part. |
