发明名称 SEMICONDUCTOR DEVICE, OR CRYSTAL
摘要 There is provided a semiconductor device including corundum crystal films of good quality. There is provided a semiconductor device including a base substrate, a semiconductor layer, and an insulating film each having a corundum crystal structure. Materials having a corundum crystal structure include many types of oxide films capable of functioning as an insulating film. Since all the base substrate, the semiconductor layer, and the insulating film have a corundum crystal structure, it is possible to achieve a semiconductor layer and an insulating film of good quality on the base substrate.
申请公布号 KR20140085414(A) 申请公布日期 2014.07.07
申请号 KR20147002063 申请日期 2013.09.24
申请人 ROCA K.K. 发明人 KANEKO KENTARO;HITORA TOSHIMI;HIRAO TAKASHI
分类号 H01L21/31;C23C16/40;C30B29/22;H01L21/02;H01L21/20;H01L21/205;H01L21/316;H01L27/12 主分类号 H01L21/31
代理机构 代理人
主权项
地址