| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy in inspecting film properties by a simple method.SOLUTION: A film inspection apparatus 100 uses a planar light-emission source 304 to irradiate a sensing point Far for an electrolyte film Mf being conveyed. A line sensor 212 receives light from the sensing point Far irradiated with light through a lens 214 and senses film properties. A displacement detector 240 detects a gap between the sensing point Far and the line sensor 212. An illumination controller 340 controls radiation light from the planar light-emission source 304 by changing the wavelength of the light depending on the gap so that light in a shorter wavelength area is radiated as the gap is smaller. |
