TEMPERATURE CONTROLLING APPARATUS OF THERMAL VACUUM CHAMBER AND TEMPERATURE CONTROLLING METHOD OF THERMAL VACUUM CHAMBER USING THE SAME

摘要

The present invention relates to a temperature regulating device for a thermal vacuum chamber and a temperature regulating method for a thermal vacuum chamber using the same. The temperature regulating device comprises a compressor which compresses outside air to a desirable pressure; a dehumidifier which is connected with the compressor and dries the compressed air supplied from the compressor; and a temperature regulator which is connected with the dehumidifier and heats or cools the compressed and dried air to a set temperature to be supplied to a shroud of a thermal vacuum chamber. The temperature regulating device for a thermal vacuum chamber can regulate the internal temperature of a thermal vacuum chamber by compressing air flowing in from the outside and drying the compressed air to become a set temperature before being supplied.