| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment device capable of highly precisely performing alignment.SOLUTION: A defect inspection device (1) includes an image transformation determination unit (103) for determining image transformation by weighing an alignment important area including an edge part that allows discrimination from a similar area in a non-defective image (202), and an alignment unit (104) for generating an aligned image by performing the image transformation on the non-defective image (202) and an inspection image. |
