| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device in which floating and seating on a turn table can be instantly switched so that movement of the processing device can be accelerated without adversely affecting the other mechanisms.SOLUTION: A floating mechanism 10 is configured of: a slider portion 30 comprising a slider surface 31 facing to a lower surface 3b of a turn table 3; a first piping 11 connected to the slider portion 30; a second piping 12 that is connected to the first piping 11 and communicated with air source 14; and a floating valve 13 arranged in the second piping 12. A seating mechanism 20 is configured of: a third piping 21 that is connected to the slider portion 30 and the first piping 11 and communicated with a suction source 23; and a suction valve 22 arranged on the third piping 21. In the first piping 11 is arranged an opening valve 40 for atmospheric opening so that floating state and seating state of the turn table 3 can be instantly switched by a control portion 50, and motion of a processing device 1 can be accelerated without adversely affecting the other mechanisms. |
