发明名称 SUBSTRATE-CLAMPING UNIT AND APPARATUS FOR DEPOSITING ORGANIC MATERIAL USING THE SAME
摘要 The present invention relates to a substrate clamping unit and an organic material depositing apparatus including the same. The substrate clamping unit includes: a mask tray where substrate is safely received and includes a square-shaped first frame and at least one of the first sticks which form an opening part by being combined with the inner side of the first frame; and a plate which includes a second frame with the square frame shape and at least one of the second sticks corresponding to the first stick. A first magnet is included in the second stick.
申请公布号 KR20140084604(A) 申请公布日期 2014.07.07
申请号 KR20120154244 申请日期 2012.12.27
申请人 LG DISPLAY CO., LTD. 发明人 NAM, MYENG WOO
分类号 H05B33/10;C23C14/24;H01L21/205 主分类号 H05B33/10
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