| 摘要 |
<p>PROBLEM TO BE SOLVED: To simultaneously achieve a higher speed and higher response of movement and higher accuracy of article positioning.SOLUTION: A moving device comprises: a head 10; a movable body 11 on the bed; a linear driving mechanism 30 including a secondary side stator 32 in one of the head and the movable body and a primary side movable element 31 in the other and configured to move the movable body; and a movable body support mechanism 20 for supporting the movable body on the head in a horizontal direction with respect to a two-dimensional plane 12 including a first axis 12a and a second axis 12b intersecting the first. The movable body support mechanism includes a plurality of first guide shafts 21a laid along the first axis on the upper part of the head, a plurality of guide shafts 21b laid along the second shaft in the lower part of the movable body, a first bearing 22a guided in the axial direction of the first guide shaft, a second bearing 22b guided in the axial direction of the second guide shaft, and a plurality of bearing blocks 22 for bearing both the first and second guide shafts.</p> |
