| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser element in which fluctuations in a parasitic capacitance of an electrode connected to a contact layer via a dielectric film are reduced.SOLUTION: The surface emitting laser element has a mesa 110 including a lower reflection mirror 103, an active layer 105, an upper reflection mirror 107 and a contact layer 109 on a substrate 101, and has a transparent dielectric film 111 layered on the contact layer 109, and a light-exiting region (A) on the dielectric film side of the mesa 110. The dielectric film 111 includes a first region covering the contact layer 109 in the light-exiting region A, an opening 111x exposing a part of the contact layer 109 outside the first region, and a second region C covering the contact layer 109 outside the opening 111x and defining a mesa outline. The first region includes a high reflectance region E and a low reflectance region D. The thickness of the dielectric film 111 in one of the high reflectance region E and the low reflectance region D, which has a larger thickness of the dielectric film, is equal to the thickness of the dielectric film 111 in the second region; and the dielectric film 111 in the second region has a uniform thickness. |
