| 摘要 |
The present invention relates to an ultra-high frequency treatment device for waste gas and, more specifically, to an ultra-high frequency treatment device for waste gas, capable of decomposing and treating organic compounds and perfluoro compound waste gas by using ultra-high frequency. The ultra-high frequency treatment device comprises a power supply part; an ultra-high frequency oscillator generating ultra-high frequency by receiving power from the power supply part; a first ultra-high frequency amplifier amplifying low power ultra-high frequency generated from the ultra-high frequency oscillator; a distributor distributing the ultra-high frequency amplified by the first ultra-high frequency amplifier; a second high frequency amplifier amplifying the ultra-high frequency distrusted by the distributor; a plurality of waste gas-treating reactors treating waste supplied inside a gas inlet by the ultra-high frequency supplied from the second ultra-high frequency amplifier and discharging the gas outside through an outlet; and an input coupler transferring the ultra-high frequency amplified from the second ultra-high frequency amplifier. The waste gas-treating reactors are connected to each other in parallel. [Reference numerals] (80,DD,EE,FF) Waste gas treating reactor;(AA) Gas after being treated;(BB) Air;(CC) Gas before being treated |
