| 摘要 |
An objective of the present invention is to easily control a holding operation apparatus to hold and release a disc-type workpiece, and to easily control an up-down operation apparatus to move an anti-scatter cover, which prevents a cleaning solution from scattering while cleaning upwards and downwards. At the start of a cleaning, a cleaning apparatus (1) holds a workpiece by a clamp arm (27) clamping an outer circumference of a disc-type workpiece (W), which is temporarily disposed on a temporary disposition unit, through a pressure from a spring unit (28) when the anti-scatter cover (5) moves upwards. After completion of the cleaning, the disc-type workpiece (W) is released by a pushing unit (272) pushing an operating unit (272) to move a holding unit (271) to an outer periphery of the disc-type workpiece (W) when the anti-scatter cover (5) is moved downwards. Therefore, an apparatus to clamp the disc-type workpiece (W) and an apparatus to move the anti-scatter cover (5) upwards and downwards may not be additionally required, hence the operating apparatus unit can be made smaller. |
