| 摘要 |
A user electrode assembly and a thin film processing apparatus having the same are provided to improve quality of the thin film by suppressing the generation of foreign material like a particle discharged to a process region. An upper electrode assembly connects a shower head and a backing plate comprising an upper electrode of a thin film processing apparatus. A space block(210) is interposed between an outer peripheral part of the shower head and the bottom surface of the peripheral part of the backing plate. A first coupling member(220) couples the upper surface of the space block and the bottom of the backing plate. A second coupling member(230) couples the inner circumference of the space block and a vertically extended terminal of the shower head. An inner side of the bottom of the space block coupled with the second coupling member is extended to the outer peripheral part of the shower head. The second coupling member is arranged in the upper part of the bottom of the space block. The space block is extended to the outer peripheral part of the shower head. |
