APPARATUS WITH FILLET RADIUS JOINTS

摘要

The present invention relates to a wafer holding device having a plurality of rods. Both ends of the plurality of rods are fixated on the end plates by joints having flanges with a fillet radius. The joints couple the components of the device. Thus, the present invention not only provides a stable wafer holding device for the hard processing conditions of the semiconductor wafer processing chambers, but also for a manual manipulation.