发明名称 EVAPORATION APPARATUS
摘要 The present invention relates to a deposition device and, more specifically, to a deposition device capable of monitoring the remaining amount of deposition materials. According to an embodiment of the present invention, the deposition device includes: a heating chamber; a furnace installed on the heating chamber and used to accommodate the deposition materials; and one or more measuring devices whereby one measuring unit is installed in the furnace. A temperature measuring device is used to monitor the deposition materials in the furnace by measuring the temperature of the deposition materials and the furnace.
申请公布号 KR20140083847(A) 申请公布日期 2014.07.04
申请号 KR20130031871 申请日期 2013.03.26
申请人 AU OPTRONICS CORP. 发明人 CHEN YI PU;WU YA TING;WU WEN HAO;TING YUNG SHENG
分类号 C23C16/44;C23C14/24 主分类号 C23C16/44
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