COMPOSITION FOR CLEANING FLAT PANEL DISPLAY AND CLEANING METHOD USING THE SAME

摘要

The present invention relates to a glass substrate cleaning composition comprising a fluorine compound, a water-soluble polar solvent, a nitric acid, and water. The glass substrate cleaning composition of the present invention improves the removal of organic matter dirt and particles existing on the surface of an initial glass substrate in a process of manufacturing a substrate for a flat panel display, improves the removal of a slipping agent or TiO2 remains due to improved solubility in a slipping agent component or TiO2 remaining on a glass substrate, and is effective in removing polishing debris of a SiO2 component produced when polishing the glass substrate.