发明名称 IMPRINT APPARATUS AND IMPRINT METHOD USING THE SAME
摘要 The present invention relates to an imprint apparatus for forming a transfer pattern on a substrate. The imprint apparatus includes a container comprising a pattern forming material and a mold member comprising an imprint pattern formed on a surface.
申请公布号 KR101415570(B1) 申请公布日期 2014.07.04
申请号 KR20070075310 申请日期 2007.07.26
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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