SINTERED IGZO SPUTTERING TARGET HAVING HIGH ZINC CONTENT AND METHOD FOR FORMING THE SAME

摘要

Disclosed is a method for producing a high density sintered body of an indium oxide-gallium oxide-zinc oxide mixed compound having a high zinc fraction. The method for producing the high density sintered body of the indium oxide-gallium oxide-zinc oxide according to the present invention comprises the steps of: producing powder mixed with indium oxide (In_2O_3) powder, gallium oxide (Ga_2O_3) powder, and zinc oxide (ZnO) at a ratio of 1:1:10; producing a mixed compound having a crystal structure of InGaZn_5O_8 by heating the mixed powder; pulverizing and micronizing the mixed compound of InGaZn_5O_8; adding zinc oxide (ZnO) powder in the mixed compound powder of InGaZn_5O_8; producing a molded product by using the mixed powder added with the zinc oxide (ZnO) powder as a main material; and sintering the molded product.