| 摘要 |
<p>The present invention relates to a wafer prober system capable of inspecting a wafer surface. The wafer prober system includes a stage unit, a loader, a tester, a control unit, and a wafer surface inspection unit to inspect a wafer surface before or after the wafer is probed. The wafer prober system uses the wafer surface inspection unit to generate wafer surface inspection information before and/or after the wafer is probed and uses the information to probe or to accurately identify a probing state in real-time.</p> |
