GAS DIFFUSIBILITY INSPECTION DEVICE AND METHOD FOR ATTACHING SAMPLE TO SAMPLE HOLDER FOR GAS DIFFUSIBILITY INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a gas diffusibility inspection device that facilitates fixing a sample even when the sample is a thin film.SOLUTION: A gas diffusibility inspection device includes: a passage for flowing therethrough a fluid that passes through a sample for inspecting gas diffusibility of the sample; a sample holder provided to the passage; and a sensor for detecting the fluid having passed through the sample. The sample holder includes: a sample holding plate for holding the sample and blocking the passage; a communicating hole provided to the sample holding plate so that the fluid can pass through the sample holding plate through the communicating hole; and an adhesive applied to the outer peripheral part of the communicating hole of the sample holding plate and adhering the sample in such a manner as to block the communicating hole.