| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an optical position measuring apparatus for measuring a position of a target object in at least two spatial freedoms.SOLUTION: The optical position measuring apparatus in which a target subject is at least arranged movably along first and second movement directions x, z, and comprises: a first reference 12 including subregions 12.1 periodically arranged along a first extension direction e1; a second reference 13 including subregions 13.1 periodically arranged along a second extension direction e2; and a scan plate in the inside of which at least first and second retroreflector elements are integrated. The first retroreflector element extends in parallel with the first extension direction e1, and the second retroreflector element extends in parallel with the second extension direction e2. A partial light flux incident to the retroreflector elements from the first and second references 12, 13 is subjected to reverse reflection of the direction of the references 12, 13, and a position signal along the first and the second movement directions x, z can be generated from the overlapped partial light flux.</p> |
