A MICROMECHANICAL SYSTEM WITH A COMPOSITE BEAM HAVING AN ADJUSTABLE STIFFNESS

摘要

A composite beam (1) having an adjustable stiffness, for example for use in an AFM, a micromechanical biosensor or acoustic actuator or sensor. The composite beam comprises at least one passive beam (2) and one responsive beam (6) for example a piezoelectric beam. The composite beam further comprises a third beam that may be either a passive beam (10) or a responsive beam, depending on the geometry of the assembly of beams. All three beams are connected at one side with a solid base element (5) and at the other side with a solid distal element (13). The internal mechanical stress induced by the responsive beam will result in a variation of the stiffness of the composite beam. So, the stiffness of the composite beam can be adjusted by stimulating the responsive beam. The composite beam can also be used in other application where the stiffness of a beam has to be adjusted such as acoustic instruments like microphones or loudspeakers or in for example acceleration sensors.