MICROELECTRONIC MACHINE-BASED VARIABLE RESONATOR

摘要

A tunable resonator is provided that has a high Q for each resonate frequency. The tunable resonator is a MEMs tunable resonator wherein the tuner is affected by moving a moveable mass, associated with the resonating portion of the resonator, form a first position to a second position such that the moveable mass is held in the first position or second position by a detent rather than a constant electromagnet magnetic or electrostatic force applied thereon.

主权项

1. A microelectronic machine (MEM) resonator comprising:
a resonation mass adapted to resonate mass, the resonation mass comprising a fixed portion and a movable portion; and a resonation adjustment structure adapted to adjust the position of the movable portion; said resonation adjustment structure having a first mode adapted for adjusting the position of the movable portion and a second mode adapted to reduce coupling of the resonation adjustment structure and the movable portion.